Linear Transfer System
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Specifications
There is more and more demand on the market to in-situ combine various UHV deposition techniques and analysis methods. In order to manage this there are two basic transfer concepts possible - the radial symmetric handler and the linear transfer system. In the following we are focussing on the linear one. The Linear Transfer is a system to combine several UHV and chambers in order to create a flexible and extensible instrumentation for in-situ preparations, analysis, storage and growth of layers without removing the wafers from the UHV during different processing steps.
Features:
- Linear transfer chamber and load-lock chamber
- Combination of different kinds of in-situ analysis, growth and preparation methods
- Linearly extensible in all directions
- Fully UHV compatible down to 10-11 bar
- Adjustment from the airside
- Mechanically or magnetically activated transfer mechanism
- Customized design for existing systems
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