Integrated UHV-System

The combination of in-situ preparation and analysis forms a new class of integrated systems. In general these systems consist of deposition-, preparation and analysis chamber. In the following an example of a typical system is presented and described for each functional part.

Load-Lock Chamber:

• Diameter 8 inch
• Sample storage up to 6 samples
• Magnetic transfer rod
• Turbo molecular pump (TMP)

Growth Chamber:

• Diameter 10 inch
• 6 x CF63 ports for effusion cells
• Sample manipulator (x,y,z), endless rotation and resistance heater
• RHEED or QCM
• Ion pump or TMP

Analysis Chamber:

• Diameter 8 inch
• Sample manipulator (x, y, z) with e-beam heater and cooling stage
• LEED and electron analyser
• Ion source, UV source, x-ray source
• AFM/STM
• Mass spectrometer
• Ion pump or TMP