Carbon Effusion Cell EBC
The carbon effusion cell is used for carbon doping in MBE applications. A pyrolytic graphite rod is heated by electron bombardement to a maximum temperature of 2000°C to evaporate elemental carbon of highest purity. The design prevents any ionized species leaving the source. The flux regulation is achieved by adjusting the emission current.
Technical Data:
Type | EBC |
Heating system | Electron beam bombardment |
Temperature range | 200°C … 2200°C |
Current stability | 10-5 of the maximum emission current |
Max. outgas temp. | 2300°C |
Max. power | 750W |
Max. current | 1A |
Bakeout temperature | 250°C |
Conditioning | Heated to maximum temperature |
Shipping | Stainless steel container with valve |
Standards:
Flange size | CF40 / CF63 or specified |
Max outer diameter | 38mm / 63mm or specified |
Length | As specified |
Thermocouple | Type C or specified |
Options:
- Integrated shutter
- Water cooling
Available Data:
For further information, please contact
sales(at)createc.de.