Atomic Hydrogen Source HCL

Atomic hydrogen is very reactive and it allows the cleaning of various substrates like galliumarsenid, indiumphosphid, etc. at low temperatures. In addition it can be also used for surfactant growth of epitaxial layers. Molecular hydrogen gas flows through a molybdenum tube passing a hot tungsten filament which is located at the end of this tube and which is heated up to 2500?C. By this an exellent cracking efficiency of molecular into atomic hydrogen is achieved. Using a high precision valve the hydrogen gas pressure can be directly adjusted. Moreover, with a mass flow controller which is mounted between the hydrogen gas bottle and the leak valve a very accurate pressure control is possible.