Effusion Cells

CreaTec offers a great variaty of effusion cells. The following types of effusion cells are available:

• TUBO effusion cell
• Single filament effusion cell (SFC)
• Low temperature effusion cell (LTC)
• Cold lip effusion cell (CLC)
• Dual filament effusion cell (DFC)
• High temperature effusion cell (HTC)
• Near ambient temperature cell (NATC)
• Valved low temperature effusion cell (V-LTC)
• Cracker effusion cell (CRC)
• Valved cracker effusion cell (V-CRC)
• Atomic hydrogen source (HCL)
• Carbon effusion cell (EBC) 
• Electron beam evaporator (EB-ST) 
• Decomposition effusion cell (DEC)
• Linear effusion cell (L-EC)

All effusion cells are manufactured under clean room conditions (class 10 -100). Selected materials are used for the effusion cells ensuring high reliability for a long term operation. Besides standard effusion cells CreaTec is well known for customised solutions for all kind of physical vapour deposition (PVD) applications.

Effusion Cells made from Molybdenum

For special applications where tantalum is not feasible CreaTec offers effusion cells completely made from molybdenum. Those effusion cells are mainly used within processes where critical chemical species are involved.

The following effusion cells are available as molybdenum version:

• Single filament effusion cell (SFC-Mo)
• Low temperature effusion cell (LTC-Mo)
• Cold-lip effusion cell (CLC-Mo)
• Dual filament effusion cell (DFC-Mo)
• Atomic hydrogen source (HCL-Mo)
• Cracker effusion cell (CRC-Mo)
• Linear effusion cell (L-EC)