Mini MBE System
Specifications MiniMBE System
The MiniMBE System is specially designed for epitaxial growth on small sample sizes in combination with a reduced size of the system. The system consists of the growth chamber for growing layers by MBE, a load-lock chamber and an optional buffer chamber. The growth chamber contains effusion cells, manipulator, cooling units, transfer to the load-lock chamber, pumping equipment and other necessary instruments.
Features
- Optimized pumping configuration
- Face-down zero force substrate transfer
- Linear shutters and substrate rotation, specified for millions of cycles
- Substrate heater option available
- Up to 11 effusion cells
- CF 63 central multifunctional port (e.g., standard sources)
- Main shutter
- Flux gauge / QCM
- RHEED
- Automated batch processing
Specifications MiniMBE System + LT-STM/AFM
The MiniMBE System with LT-STM/AFM is specially designed for epitaxial growth of thin layers or multilayers and in-situ investigations with LT-STM/AFM. The combination of two major parts of CreaTec‘s product range gives us the opportunity to create a flexible device. The MiniMBE with LT-STM/AFM can easily be adapted to special requirements.
Features
- Combined epitaxial growth with in-situ LT-STM/AFM
- High quality surface preparation and fast reliable transfer
- Optimized for high resolutions LT-STM and AFM state-of-the art measurements
- Base temperature LT-STM/AFM below 5 K
- Low LN2 and LHe consumption
- Long-term low-temperature spectroscopy and atom manipulation
- Fully equipped MBE system
- Powerful software package
Related Products
LT-STM/AFM Manipulators Linear Shutter Edge Transfer Tools RHEED System Beam Flux Monitor Quatz Crystal Monitor cVac Control Software