Effusion Cell Shutters
Typical shutters for effusion cells are designed with two stacked shutter blades - one is looking towards the orifice of the cell and the other one towards the substrate.
The effect is that the substrate orientated shutter blade stays relatively cool whereas the orifice orientated one gets very hot. Both blades can be easily exchanged. Shutter size and dimensions vary according to the application.
Technical Data:
Type | SH |
Working principle | Rotational shutter |
Temperature range | According to effusion cell |
Bakeout temperature | 250°C |
Conditioning | Heated to maximum temperature with the effusion cell |
Shipping | Attached to effusion cell in a stainless steel container with valve |
Standards:
Flange size | CF16 / CF40 / C63 or as specified |
Shutter blade | Molybdenum, tantalum, PBN or PGR |
Shutter rod | Molybdenum or tantalum |
Length | As specified |
Blade diameter | As specified |
Actuator | Manual (SH-M), pneumatic (SH-P) or electrical (SH-E) |
Options:
- Shutter controller
- Linear shutter
- Substrate shutter
- Shutter for wedged structures with programmable motorization
- Masks and all kind of shutter blade
For further information, please contact
sales(at)createc.de.