Here is our latest innovation: CreaTec's revolutionary TUBO source for ultrahigh temperature, ultrahigh purity operation is now available in a special version for evaporating Si. Using an all metal, patented crucible design developed in collaboration with the Max Planck Institute for Intelligent Systems (formerly Max Planck institute for Metals Research), Stuttgart, Germany, this source can evaporate Si from the liquid at high growth rates similar to or even exceeding e-beam evaporators. In contrast to e-beam evaporators, however, it offers the stability and reproducibility of a thermocouple controlled effusion source, together with the reliable, ultrahigh purity TUBO design. And, since the evaporating Si atoms do not traverse an electron beam, they are not ionized.
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