Integrated UHV-System
The combination of in-situ preparation and analysis forms a new class of integrated systems. In general these systems consist of deposition-, preparation and analysis chamber. In the following an example of a typical system is presented and described for each functional part.
Load-Lock Chamber:
- Diameter 8 inch
- Sample storage up to 6 samples
- Magnetic transfer rod
- Turbo molecular pump (TMP)
Growth Chamber:
- Diameter 10 inch
- 6 x CF63 ports for effusion cells
- Sample manipulator (x,y,z), endless rotation and resistance heater
- RHEED or QCM
- Ion pump or TMP
Analysis Chamber:
- Diameter 8 inch
- Sample manipulator (x, y, z) with e-beam heater and cooling stage
- LEED and electron analyser
- Ion source, UV source, x-ray source
- AFM/STM
- Mass spectrometer
- Ion pump or TMP
For further information, please contact
sales(at)createc.de.