Linear Effusion Cell (L-EC)
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Specifications
The Linear Effusion Cell (L-EC) is designed for continuous evaporation deposition on substrate tapes. According to requirements, the cell can be optimized regarding homogeneity, source material, width of the tape, etc. A water cooling around the heating system, allows processes at higher temperatures without affecting surroundings.
Options:
- Single filament
- Dual filament
TYPE | L-EC |
TEMPERATURE RANGE | 200 - 1400 °C |
HEATING SYSTEM | wire filament | radiation heating |
MAX. POWER | 1500 W (200 cc crucible) |
BAKE-OUT TEMPERATURE | 250 °C |
DESIGN | as specified |