Electron Beam Evaporator EB-ST

The CreaTec electron beam evaporator is designed for the evaporation of low vapour pressure materials either from wire, rod or crucible under true UHV conditions. The instrument is suitable for metals like iron, cobalt, nickel, silver, copper, gold, palladium, platinum etc. and insulators like magnesiumoxide, magnesiumfluoride, calciumfluoride etc. and semiconductors in particular silicon from rod. Its compact design allows the integration of up to four units on a NW 150 CF cluster flange. A high precision control unit is used for the instantaneous variation of all necessary parameters.

Technical Data:

Type	EB-ST
Heating system	E-beam heating, tungsten (self supported)
Max. emission current	100mA
Max. filament heating	10V / 10A
Emission control or manual adjustment of filament and emission current
Target voltage	1000V
Target alignment	25mm
Flux monitor	2nA - 20mA
Evaporation area	Ø 5 - 20mm
Water-cooled shield assembly Water-cooled target feedthrough Integrated flux monitor Manual shutter
Bakeout temperature	250°C
Shipping	Stainless steel container with valve

Standards:

Flange size	CF40 / CF63 or specified
Max outer diameter	38mm
Length	As specified
Crucible material	W/ Ta/ Mo
Crucible capacity	0.8 cc

Options:

Different conductive crucible materials are available
RS-232 interface for software control
Motorization of shutter and target alignment

Available Data:

Effusion-cell-EB-ST.pdf (84.44 KB)

For further information, please contact
sales(at)createc.de.