Transfer-Systems

There is more and more the demand on the market to in-stu combine various UHV deposition techniques and analysis methods. In order to manage this there are two basic transfer concepts possible - the radial symmetric handler and the linear transfer system. In the following we are focussing on the linear one.

Technical Data:

Type	TR
Concept	Load-lock and transfer chamber
Made from	Stainless steel (316 L / 316 LN)
Sample size	2 - 4 inch or as specified
Sample storage	Up to 10 or as specified
Transfer	Trolley (with adjustable rail) and transfer rod, manually
Bakeout temperature	200°C
Shipping	Wooden box
Installation	Included

Standards:

Chamber size	6 inch or as specified
Number of system ports	4
Pumping	Ion pump (transfer chamber) and TMP (load-lock chamber) or as specified
Sample transfer	Manual with magnetically coupled trolley
Sample preparation	Heating station (degas of water) in the load-lock chamber
Bake out system	Included
Frame	Solid frame made of stainless steel

Options:

Further system ports
Motorisation and automisation of the transfer
Heating station in the transfer modul for sample preparation

For further information, please contact
sales(at)createc.de.