OLED-System
Complete vacuum system for organics, polymers and biomaterials with compact and expandable design.
Technical Data:
Type | RS-2-O |
Concept | Load-lock and growth chamber |
Made from | Stainless steel (316 L / 316 LN) |
Effusion cell port number | 4 - 8 |
Manipulator | Radiation heating up to 800 °C |
Cooling | Additional shroud in the area of the substrate |
Bakeout temperature | 200°C |
Shipping | Wooden box |
Installation | Included |
Standards:
Growth chamber size | 16 inch or as specified |
Number of effusion cells | 2 x LTC, 2 x NATC with integrated manual shutter and water cooling or as specified |
Sample size | 2 inch |
Flux measurement | Integrated QCM |
Pumping | TMP (growth chamber) and TMP (load-lock chamber) or as specified |
Sample transfer | Manual |
Bake out system | Included |
Frame | Solid frame made of stainless steel |
Electronics | Stored in an external 19 inch rack |
Options:
- Expandable design for the attachment of further equipment
- Motorisation of transfer and automisation (EMERALT)
- Further effusion cells, plasma sources or e-beam evaporators
- Integration of RHEED (SAFIRE), Ellipsometry or RDS
- Attachment to a nitrogen flooded glove box
- Facilities for oxygen free refilling of the effusion cells
For further information, please contact
sales(at)createc.de.