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Carbon Effusion Cell EBC

The carbon effusion cell is used for carbon doping in MBE applications. A pyrolytic graphite rod is heated by electron bombardement to a maximum temperature of 2000°C to evaporate elemental carbon of highest purity. The design prevents any ionized species leaving the source. The flux regulation is achieved by adjusting the emission current.

Technical Data:

Type	EBC
Heating system	Electron beam bombardment
Temperature range	200°C … 2200°C
Current stability	10^-5 of the maximum emission current
Max. outgas temp.	2300°C
Max. power	750W
Max. current	1A
Bakeout temperature	250°C
Conditioning	Heated to maximum temperature
Shipping	Stainless steel container with valve

Standards:

Flange size	CF40 / CF63 or specified
Max outer diameter	38mm / 63mm or specified
Length	As specified
Thermocouple	Type C or specified

Options:

Integrated shutter
Water cooling

Available Data:

Effusion-cell-EBC.pdf (76.27 KB)

For further information, please contact
sales(at)createc.de.